System
Smart Automation Leader - DrimSys
Environment data collection
Overview
Equipped with an environment sensor (temperature, humidity, differential pressure, dust, vibration, etc.) within a semiconductor FOUP, this is used to collect environment data by moving from equipment to equipment, connect the collected data with an upper system, and realize its automation.
Feature
- Possible to equip additional sensors if required by customers.
- Possible to use it for 12 hours with just a single charge.
- Possible to precisely measure it with an extremely sensitive sensor
- Support various protocols such as SECS, EDA, Modubus, etc.
Related Product * Click the image below to a detailed page.
Reference
- SK Hynix Novellus Equipment Baratron Guage Data Collection
- Samsung Electronics NRD FAB Temperature / Humidity Monitoring
- SK Hynix Sensor Data Collection in N2 Stocker
Application Client
- Samsung Electronics
- SK Hynix
- 3F SKYVIEW Bldg. 147, Baumoe-ro, Seocho-gu
- T 02-6959-5202
- F 02-6959-5201
- M marketing@drimsys.com
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