Overview

OCMS - 1000 is a chemical concentration sensor, which supports multiple connectivity and advances user interface features. It is equipped with a SECS driver, owns a dispatching feature, and smoothly expands interface between systems.

The introduction of OCMS - 1000 facilitates a rapid delivery of information into upper systems such as MES, EAP (TC), and FDC regardless of communication protocols adopted by the manufacturing equipment and is widely available from new factories of semiconductor / display manufacturers to the existing factories.

Feature