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System

Smart Automation Leader - DrimSys

Accessory equipment data collection

Overview

This collects and controls data such as conditions, environments, and alarms of accessory equipment assisting main equipment directly involved in the product production / analysis and is used to raise the operation rate of the main equipment.

Feature

  • Various records of equipment data collection.
  • Collect Real Time Equipment Data.
  • Convert data into a message format used by an upper system and deliver it.

Related Product * Click the image below to a detailed page.

Vender & Model

  • Vender
    Model
  • Vender
    Model
  • Edwards
    IXH2530 / IGX1000N / IH1800 / IH1800HTX / IH1000MK5
  • LOT
    DD1055PW / DD605P / DD1205P / HD2000P / HD3000 Series / HD120P
  • Adixen
    ADS1202H / 3CHEM A100P / A803H / ADS602P / ADS602H / A1803H
  • Unisem
    ATOM1000(s)-17 / UN2004A-PGS / PGSUN2004A-PGS
  • GST
    MK-3 1.8 / MK-3 2.0 / MK-3 DVO / MK-3 1.8 MINI
  • Kanken
    KT1000MFS-G / KT1000MF / KT1000MFS-G
  • MAT
    MAT507BW / MAT507BWA / MAT507BWS / MAT509HW
  • GNBS
    WLS1000
  • BOBOO
    Auto Gate Valve / HOT N2 / Heatjacket
  • J-Sol
    HOT N2
  • SMI
    Heatjacket
  • MI
    Heatjacket
  • Cymer
    XLA165 / 7010
  • Ebara
    EST500WN / A300W-M / EV-M302V / EV-M502N-BE / A500W-T
  • Kashiyama
    SDEM30KT / SDE30M20 / HS1203X-ST
  • Entegris
    Mini Pump
  • CSK
    CHAOS-S / CHAOS-PS / HESTIA-S / CS095SC
  • Youngjin
    HPS-02 / HPS-04 / HPS-04R / HPS-04S / HPS-04M / HPS-04R
  • KPC
    KSH-400-DD / KSH-400-SB / KSH-400-DD6 / KSH-400-S17
  • PTC
    BW400SN / PGS-256S
  • DOORI
    Auto Gate Valve
  • Teratech
    Auto Gate Valve
  • Husem
    Heatjacket
  • Hot&Cool
    Heatjacket
  • Hanyang Tec.
    Gas Cabinet GK2000
  • Gigaphoton
    GT40A / G41K4

Reference

  • SK Hynix Icheon, Cheongju, Wuxi Subcomponent Data Collection
  • Samsung Electronics NRD Pump Data Collection
  • Samsung Display Pump Data Collection
  • SK Hynix Kashiyama Pump Data Collection
  • Samsung Electronics LCD Research Institute Scrubber Data Collection
  • (Japan) Toshiba Semiconductor Unisem Scrubber Data Collection
  • SK Hynix Icheon Heatjacket Data Collection
  • SK Hynix Photo Processing Laser Equipment Data Collection
  • (US) TriQuint Laser Equipment Data Collection

Application Client

  • Samsung Electronics
  • SK Hynix
  • (Japan) Toshiba Semiconductor
  • (US) TriQuint
  • Samsung Display
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